Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy
نویسندگان
چکیده
We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. This small range system is based on a commercial nanopositioning stage driven by piezoelectric transducers with the range (200 × 200 × 10) µm. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system and serve as sensors for othogonality alignment.
منابع مشابه
Interferometer Controlled Positioning for Nanometrology
We present a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The interferometric setup not only improves resolution of the position control but also ensures direct traceability to the primary etalon of length. The system was developed t...
متن کاملControl approach to high-speed large-range AFM imaging and nanofabrication
In this thesis, two inversion-based feedforward control approaches have been developed and implemented to high-speed large-range atomic force microscope (AFM) imaging and nanofabrication, respectively. High-speed large-range AFM imaging and nanofabrication are needed in many areas and have attracted great interests. Challenges, however, must be overcome because in high-speed largerange AFM oper...
متن کاملPiezo-driven metrological multiaxis nanopositioner
We report on the development of a metrological multiaxis nanopositioning device, which is operated by the piezo-based inertial method, as a sample stage for scanning probe microscopy. It has long moving range, unlimited in principle, and nanometer ~microradian! resolution. Two operation methods, inertial sliding and inertial walking, can be applied to the stage and the inertial operating method...
متن کاملScanning hall probe microscopy technique for investigation of magnetic properties
Scanning Hall Probe Microscopy (SHPM) is a scanning probe microscopy technique developed to observe and image magnetic fields locally. This method is based on application of the Hall Effect, supplied by a micro hall probe attached to the end of cantilever as a sensor. SHPM provides direct quantitative information on the magnetic state of a material and can also image magnetic induction under a...
متن کاملScanning hall probe microscopy technique for investigation of magnetic properties
Scanning Hall Probe Microscopy (SHPM) is a scanning probe microscopy technique developed to observe and image magnetic fields locally. This method is based on application of the Hall Effect, supplied by a micro hall probe attached to the end of cantilever as a sensor. SHPM provides direct quantitative information on the magnetic state of a material and can also image magnetic induction under a...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره 14 شماره
صفحات -
تاریخ انتشار 2014